1.

Conference Proceedings
Conference Proceedings
1. Implementation of a closed-loop CD and overlay controller for sub-0.25-ｦﾌm patterning
Sturtevant,J.L. ; Weilemann,M.R. ; Green,K.G. ; Dwyer,J. ; Robertson,E. ; Hershey,R.R.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.461-470,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Calibration of the Stellar X-Ray Polarimeter
Tomsick,J. ; Costa,E. ; Dwyer,J. ; Elsner,R. F. ; Ford,E. ; Kaaret,P. E. ; Novick,R. ; Santangelo,A. E. ; Silver,E. ; Soffitta,P. ; Weisskopf,M. C. ; Ziock,K. P.
Pub. info.: EUV, X-ray, and gamma-ray instrumentation for astronomy VIII : 30 July - 1 August 1997, San Diego, California, Oswald H. W. Siegmund, Mark A. Gummin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.  pp.373-383,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3114