1.

Conference Proceedings
Conference Proceedings
1. Understanding And Modeling Ramp Rate Effects On Shallow Junction Formations
Chakravarthi, Srinivasan ; Gencer, Alp H. ; Dunham, Scott T. ; Downey, Daniel F.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B4.8-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. MEASUREMENTS OF ENHANCED DIFFUSION OF BURIED LAYERS IN SILICON MEMBRANE STRUCTURES DURING OXIDATIN
Dunham, Scott T. ; Agarwal, Anuradha M. ; Jeng, Nanseng
Pub. info.: Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.543-548,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 163
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECTS OF INTERFACE ROUGHNESS ON ELLIPSOMETRIC MEASUREMENTS OF THIN OXIDES
Dunham, Scott T. ; Agrawal, Bhawana
Pub. info.: SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A..  pp.301-306,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 105
4.

Conference Proceedings
Conference Proceedings
4. Modeling of Dislocation Loop Growth and Transient-Enhanced Diffusion in Silicon for Amorphizing Implants
Gencer, Alp H. ; Dunham, Scott T.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.35-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
5.

Conference Proceedings
Conference Proceedings
5. 3-D Atomistic Simulations of Submicron Device Fabrication
Bunea, Marius M. ; Dunham, Scott T.
Pub. info.: Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A..  pp.3-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 490
6.

Conference Proceedings
Conference Proceedings
6. Lattice Monte Carlo Simulations of Vacancy-Mediated Diffusion and Aggregation Using Ab Initio Parameters
Bunea, Marius M. ; Dunham, Scott T.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.353-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
7.

Conference Proceedings
Conference Proceedings
7. Point Defect Properties From Metal Diffusion Experiments-What Does the Data Really Tell Us?
Chakravarthi, Srinivasan ; Dunham, Scott T.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.47-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
8.

Conference Proceedings
Conference Proceedings
8. Modeling of Dislocation Loop Growth and Transient Enhanced Diffusion in Silicon for Amorphizing Implants
Gencer, Alp H. ; Dunham, Scott T.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.27-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
9.

Conference Proceedings
Conference Proceedings
9. Moment-Based Modelling of Extended Defects for Simulation of TED: What Level of Complexity is Necessary?
Gencer, Alp H. ; Dunham, Scott T.
Pub. info.: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.105-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 532
10.

Conference Proceedings
Conference Proceedings
10. Ab-Initio Calculations To Model Anomalous Fluorine Behavior
Diebel, Milan ; Dunham, Scott T.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.169-174,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717