1.

Conference Proceedings
Conference Proceedings
1. Erbium photoluminescence in sol-gel-derived titanium dioxide films
Gaponenko,N.V. ; Sergeev,O.V. ; Misiewicz,J. ; Gnaser,H. ; Heiderhoff,R. ; Cramer,R.M. ; Balk,L.J. ; Dunbar,A. ; Hamilton,B.
Pub. info.: Epilayers and heterostructures in optoelectronics and semiconductor technology : International Conference on Solid State Crystals '98 : 12-16 October 1998, Zakopane, Poland.  pp.239-242,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3725
2.

Conference Proceedings
Conference Proceedings
2. Overlay-performance on tungsten CMP layers using the ATHENA alignment system
Rivera,G. ; Rozzoni,L. ; Castellana,E. ; Miraglia,G. ; Lam,P.L. ; Plauth,J. ; Dunbar,A. ; Phillips,M.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.428-440,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings
Conference Proceedings
3. Control and uniformity of 280-nm features in i-line lithography using optical proximity corrections and off-axis illumination
Watson,G.P. ; Garofalo,J.G. ; Hansen,M. ; Grodnensky,I.M. ; Zych,L.J. ; Takahashi,R. ; Yarbrough,W.J. ; Ehrlacher,E. ; Reim,A. ; Vella,R.M. ; Dunbar,A. ; Colina,A. ; Herrero,B. ; Castro,D.
Pub. info.: Optical Microlithography X.  pp.374-383,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051