1.

Conference Proceedings
Conference Proceedings
1. Developing a New Material for MEMS: Amorphous Diamond
Sullivan, J.P. ; Friedmann, T.A. ; Boer, M.P. de ; Van, D.A. La ; Hoflfelder, R.J. ; Ashby, C.I.H. ; Dugger, M.T. ; Mitchell, M. ; Dunn, R.G. ; Magerkurth, A.J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657
2.

Conference Proceedings
Conference Proceedings
2. Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films
Alsem, D.H. ; Stach, E.A. ; Muhlstein, C.L. ; Dugger, M.T. ; Ritchie, R.O.
Pub. info.: Nanoscale materials and modeling -- relations among processing, microstructure and mechanical properties : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.331-336,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 821
3.

Conference Proceedings
Conference Proceedings
3. Performance of Ultrahard Carbon Wear Coatings on Microgears Fabricated by LIGA
AgerIII, J.W. ; Brown, I.G. ; Christenson, T.R. ; Dugger, M.T. ; Follstaedt, D.M. ; Knapp, J.A. ; Monteiro, O.R.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.115-120,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546
4.

Conference Proceedings
Conference Proceedings
4. Wear Mechanisms in a Reliability Methodology
Tanner, D.M. ; Dugger, M.T.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.22-40,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4980
5.

Conference Proceedings
Conference Proceedings
5. Degradation of monolayer lubricants for MEMS
Dugger, M.T. ; Hohlfelder, R.J. ; Peebles, D.E.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.138-150,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4980