Durand, C. ; Vallee, C. ; Salicia, O. ; Loup, V. ; Bonavalot, M ; Joubert, O. ; Dubourdieu, C.
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Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.8-13, 2003. Pennington, N.J.. Electrochemical Society
Dubourdieu, C. ; Lindner, J. ; Audier, M. ; Rosina, M. ; Weiss, F. ; Senateur, J. P. ; Hodeau, J. L. ; Dooryhee, E. ; Berar, J. F.
Pub. info.:
Applications of synchrotron radiation techniques to materials science V : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.219-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Thery, J. ; Baron, T. ; Dubourdieu, C. ; Ternon, C ; Pelissier, B. ; Roussel, H. ; Coindeau, S. ; Prejbeanu, I.
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Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.498-509, 2005. Pennington, N.J.. Electrochemical Society
Durand, C. ; Vallee, C. ; Dubourdieu, C. ; Bonvalot, M. ; Gautier, E. ; Joubert, O.
Pub. info.:
Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.. pp.195-200, 2004. Warrendale, Pa.. Materials Research Society
Dubourdieu, C. ; Kim, G. Y. ; Meyer, J. D. ; Gallois, B.
Pub. info.:
In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.. pp.89-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Thomas, O. ; Weiss, F. ; Hudner, J. ; Haase, R. ; Dubourdieu, C. ; Mossang, E. ; Didier, N. ; Senateur, J. P.
Pub. info.:
Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.209-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Modreanu, M. ; Hurley, P.K. ; O'Sullivan, B.J. ; O'Looney, B. ; Senateur, J.-P. ; Rousell, H. ; Rousell, F. ; Audier, M. ; Dubourdieu, C. ; Boyd, I.W. ; Fang, Q. ; Leedham, T.L. ; Rushworth, S.A. ; Jones, A.C. ; Davies, H.O. ; Jimenez, C.
Pub. info.:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications. Part Two pp.1236-1246, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering