Conrad, J. ; Dubey, M. ; Ewin, M. ; Piekarz, R. ; Rod, B. ; Shepard, J. ; Su, T. ; Trolier-McKinstry, S. ; Zeto, R.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.159-164, 1999. Warrendale, Pa.. Materials Research Society
Zakar, E. ; Dubey, M. ; Polcawich, R. ; Piekarski, B. ; Piekarz, R. ; Conrad, J. ; Widuta, R.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.287-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Dubey, M. ; McLane, G. F. ; Jones, K. A. ; Lareau, R. T. ; Eckart, D. W. ; Han, W. Y. ; Roberts, C. ; Dunkel, J. ; West, L. C.
Pub. info.:
Compound semiconductor epitaxy : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.411-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Dubey, M. ; Jones, K. A. ; Casas, L. M. ; Eckart, D. ; Pfeffer, R. L.
Pub. info.:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.601-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society