1.

Conference Proceedings
Conference Proceedings
1. Low-temperature processing of SiO2 thin films by HD-PECVD technique for gate dielectric applications
Joshi, P.C. ; Moriguchi, M. ; Crowder, M.A. ; Droes, S.R.T. ; Flores, J.S. ; Voutsas, A.T. ; Hartzell, J.W.
Pub. info.: Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas.  pp.105-112,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5004
2.

Conference Proceedings
Conference Proceedings
2. Location-controlled crystallization of Si films for TFT circuitapplications
Crowder, M.A. ; Voutsas, A.T. ; Droes, S.R.T. ; Moriguchi, M. ; Mitani, Y.
Pub. info.: Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas.  pp.77-83,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5004
3.

Conference Proceedings
Conference Proceedings
3. TFT threshold voltage adjustment with in-situ doped PVD silicon films
Droes, S.R.T. ; Atkinson, M.M. ; Guthrie, P.R. ; Crowder, M.A. ; Voutsas, A.T.
Pub. info.: Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas.  pp.95-104,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5004