1.

Conference Proceedings

Conference Proceedings
van Adrichem, P.J.M. ; Driessen, F.A.J.M. ; van Hasselt, K. ; Brueck, H.-J.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.551-557,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
2.

Conference Proceedings

Conference Proceedings
Adrichem, P.J.M. ; Driessen, F.A.J.M. ; Hasselt, K.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.1019-1025,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings

Conference Proceedings
Pierrat, C. ; Driessen, F.A.J.M. ; Vandenberghe, G.
Pub. info.: Optical Microlithography XVI.  Part One  pp.282-293,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040