1.

Conference Proceedings

Conference Proceedings
Drake,P.
Pub. info.: Lens design, illumination and optomechanical modeling : 29-30 July 1997, San Diego, California.  pp.136-147,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3130
2.

Conference Proceedings

Conference Proceedings
Boutamine,H. ; Karam,J.M. ; Courtois,B. ; Drake,P. ; Oudinot,J. ; El Tahawi,H. ; Cao,A. ; Rencz,M. ; Poppe,A. ; Szekely,V.
Pub. info.: Microlithography and Metrology in Micromachining III.  pp.76-84,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3225