1.

Conference Proceedings

Conference Proceedings
Wolfram, H. ; Schmiedel, R. ; Hiller, K. ; Aurich, T. ; Gunther, W. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; GeBner, T.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.326-340,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings

Conference Proceedings
Hanf, M. ; Schaporin, A.V. ; Hahn, R. ; Dotzel, W. ; Gessner, T.
Pub. info.: MEMS/MOEMS Components and Their Applications II.  pp.117-126,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5717
3.

Conference Proceedings

Conference Proceedings
Kehr, K. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; Cessner, T.
Pub. info.: Microsystems Metrology and Inspection.  pp.24-35,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3825
4.

Conference Proceedings

Conference Proceedings
Kurth, S. ; Kaufmann, C. ; Hahn, R. ; Mehner, J. ; Dotzel, W. ; Gessner, T.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.23-33,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721