1.

Conference Proceedings
Conference Proceedings
1. KINETICS OF THERMAL DECOMPOSITION OF GROUP-III METAL ALKYLS ON GaAs(100)
Donnelly, V.M. ; McCaulley, J.A. ; Shul, R.J.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.15-24,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
2.

Conference Proceedings
Conference Proceedings
2. Selected Topics in Plasma Processing Research
Lee, J.T.C. ; Colonell, J.J. ; Klemens, F.P. ; Baumann, F.H. ; Kornblitt, A. ; Lee, H. ; Maynard, H.L. ; Sorsch, T.W. ; Timp, G.L. ; Layadi, N. ; Malyshev, M.V. ; Donnelly, V.M. ; Ciampa, N.A.
Pub. info.: Proceedings of the twelfth International Symposium on Plasma Processing.  pp.1-12,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-4
3.

Conference Proceedings
Conference Proceedings
3. LASER INDUCED DECOMPOSITION OF TRIETHYLGALLIUM AND TRIMETHYLGALLIUM ADSORBED ON GaAs (100)
McCaulley, J.A. ; McCrary, V.R. ; Donnelly, V.M.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.159-164,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
4.

Conference Proceedings
Conference Proceedings
4. *SELECTED AREA GROWTH OF GaASs BY LASER INDUCED PYROLYSIS OF ADSORBED Ga-ALKYLS
Donnelly, V.M. ; McCaulley, J.A. ; McCrary, V.R. ; Tu, C.W.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.147-158,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
5.

Conference Proceedings
Conference Proceedings
5. CHARACTERIZATION OF EXCIMER LASER DEPOSITED GaAS FILMS FROM THE PHOTOLYSIS OF TRIMETHYLGALLIUM AND TRIMETHYLARSINE AT 193 nm.
McCrary, V.P. ; Donnelly, V.M. ; Brasen, D. ; Appelbaum, A. ; Farrow, R.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.223-232,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
6.

Conference Proceedings
Conference Proceedings
6. PRODUCTION OF ELECTRONICALLY EXCITED P2 AND In FROM ArF EXCIMER LASER IRRADIATION OF InP
Donnelly, V.M. ; McCrary, V.R. ; Brasen, D.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.567-574,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
7.

Conference Proceedings
Conference Proceedings
7. OPTICAL DIAGNOSTIC STUDIES IN PLASMA AND PLASMA PROCESSING
Donnelly, V.M.
Pub. info.: Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.95-108,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 68
8.

Conference Proceedings
Conference Proceedings
8. COPPER CVD REACTIONS OF Cu(I)(hfac)(vtms) ADSORBED ON TiN
Guinn, K.V. ; Donnelly, V.M. ; Gross, M.E. ; Baiocchi, F.A. ; Petrov, I. ; Greene, J.E.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.379-386,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282