1.

Conference Proceedings
Conference Proceedings
1. EFFECTS OF EXCIMER LASER IRRADIATION ON MBE AND MO-MBE GROWTHS OF (Al)GaAs ON GaAs AND (Ca,Sr)F2/GaAs SUBSTRATES
Donnelly, V. M. ; Tu, C. W. ; Beggy, J. C. ; McCrary, V. R. ; Harris, T. D. ; Lamont, M. G. ; Baiocchi, F. A. ; Farrow, R. C.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.291-300,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings
Conference Proceedings
2. EXCIMER LASER-INDUCED DEPOSITION OF InP and INDIUM-OXIDE FILMS
Donnelly, V. M. ; Geva, M. ; Long, J. ; Karlicek, R. F.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.73-80,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
3.

Conference Proceedings
Conference Proceedings
3. Reactions of C2(X1ｦｲg+) and (a3IIi) Produced by Multiphoton UV Excimer Laser Photolysis
Pasternack, Louise R. ; McDonald, J. R. ; Donnelly, V. M.
Pub. info.: Laser probes for combustion chemistry.  pp.381-,  1980.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 134
4.

Conference Proceedings
Conference Proceedings
4. Pulsed-Laser Studies of the Kinetics of C2O(A3IIi and X3ｦｲ-)
Donnelly, V. M. ; Pitts, William M. ; Baronavski, A. P.
Pub. info.: Laser probes for combustion chemistry.  pp.389-,  1980.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 134
5.

Conference Proceedings
Conference Proceedings
5. Low Resistance Copper Via Technology
Ueno, K. ; Donnelly, V. M. ; Tsuchiya, Y. ; Aoki, H.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.521-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
6.

Conference Proceedings
Conference Proceedings
6. CHEMICAL TOPOGRAPHY OF Si ETCHING IN A Cl2 PLASMA, STUDIED BY X-RAY PHOTOELECTRON SPECTROSCOPY AND LASER-INDUCED THERMAL DESORPTION
Donnelly, V. M. ; Guinn, K. V. ; Cheng, C. C. ; Herman, I. P.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.425-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
7.

Conference Proceedings
Conference Proceedings
7. Optical and Mass Spectrometric Diagnostic Methods for Plasma Etching
Donnelly, V. M.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.3-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406