1.

Conference Proceedings
Conference Proceedings
1. Effect Of Nitrogen Implants On Boron Transient Enhanced Diffusion
Dokumaci, Omer ; Ronsheim, Paul ; Hegde, Suri ; Chidambarrao, Dureseti ; Shaik-Adam, Lahir ; Law, Mark E.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B5.9-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. Diffusion and Defect Structure in Nitrogen Implanted Silicon
Dokumaci, Omer ; Kaplam, Richard ; Khare, Mukesh ; Ronsheim, Paul ; Burnham, Jay ; Domenicucci, Anthony ; Li, Jinghong ; Fleming, Robert ; Adam, Lahir S. ; Law, Mark E.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
3.

Conference Proceedings
Conference Proceedings
3. Diffusion of Implanted Nitrogen in Silicon at High Doses
Adam, Lahir Shaik ; Robertson, Lance ; Law, Mark E. ; Jones, Kevin ; Gable, Kevin ; Hegde, Suri ; Dokumaci, Omer
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669