1.

Conference Proceedings
Conference Proceedings
1. Fabrication of SiGe-on-insulator and applications for strained Si (Invited Paper)
Lin, C. ; Liu, W. ; An, Z. ; Di, Z. ; Zhang, M.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.136-141,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
2.

Conference Proceedings
Conference Proceedings
2. Relaxation mechanism of SiGe thin film on SOI substrate
Di, Z. ; Zhang, M. ; Liu, W. ; Zhu, M. ; Lin, C. ; Chu, P. K.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.611-615,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
3.

Conference Proceedings
Conference Proceedings
3. Relaxed SiGe-on-insulator substrates through implanting oxygen into pseudomorphic SiGe/Si heterostructure
Zbang, M. ; An, Z. ; Wu, Y. ; Di, Z. ; Chu, P. ; Lin, C.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.111-116,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5