1.

Conference Proceedings
Conference Proceedings
1. Utilization of Optical Emission Spectroscopy in Characterization of Microwave Plasma
Anna-Marie Weed ; Vincent M. Donnelly ; Demetre J. Economou ; Vladimir Samara
Pub. info.: Student Poster Sessions 2014 : Core Programming Area at the 2014 AIChE Annual Meeting : Atlanta, Georgia, USA, 16-21 November 2014.  pp.357-357,  2014.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: 2014
2.

Conference Proceedings
Conference Proceedings
2. 375a. Using High Fidelity Simulation in the Design of Experiments for Optimizing Etch Uniformity in Plasma Etching Reactors
Nirmal Tatavalli Mittadar ; Demetre J. Economou ; Michael Nikolaou ; Jingang Yi ; Simon McClatchie
Pub. info.: 2005 annual meeting & fall showcase : '05 AIChE, Oct 30 - Nov 4 : conference proceedings, Cincinnati Convention Center, Cincinnati, OH : non-topical presentation records : 10. Computing and Systems Technology Division.  2005.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-221(2)
3.

Conference Proceedings
Conference Proceedings
3. Experimental Diagnostics and Modeling of Microplasma Discharges
Demetre J. Economou ; Vincent M. Donnelly ; Qiang Wang
Pub. info.: 2006 AIChE annual meeting, November 12-17, 2006, San Francisco, California, San Francisco Hilton : conference proceedings. Non-topical conferences.  2006.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-235
4.

Conference Proceedings
Conference Proceedings
4. 56a. Past and Future of Modeling and Simulation for Plasma Processing
Demetre J. Economou
Pub. info.: AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences.  pp.P110425-,  2008.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-255
5.

Conference Proceedings
Conference Proceedings
5. Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
Nirmal Tatavalli Mittadar ; Michael Nikolaou ; Demetre J. Economou
Pub. info.: 2006 AIChE annual meeting, November 12-17, 2006, San Francisco, California, San Francisco Hilton : conference proceedings. Non-topical conferences.  2006.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE Conference Proceedings
Ser. no.: P-235