1.

Conference Proceedings
Conference Proceedings
1. Image shortening and process development in BEOL lithography
DellaGuardia,R. ; Warner,D.J. ; Chen,Z. ; Stetter,M. ; Ferguson,R.A. ; McGuire,A.E. ; Badger,K.D.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.952-961,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. 193 lithography and RELACS processing for BEOL lithography
DellaGuardia,R. ; Petrillo,K.E. ; Chen,J. ; Rabidoux,P. ; Dalton,T.J. ; Holmes,S.J. ; Hadel,L.M. ; Malone,K. ; Mahorowala,A.P. ; Greco,S. ; Ferguson,R.A.
Pub. info.: Optical Microlithography XIV.  4346  pp.1029-1040,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346