1.

Conference Proceedings
Conference Proceedings
1. Ultrasonic cure and temperature monitoring of photoresist during the pre-exposure bake process
Morton,S.L. ; Degertekin,F.L. ; Khuri-Yakub,B.T.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.254-261,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencles
Crozier,K.B. ; Yaralioglu,G.G. ; Degertekin,F.L. ; Adams,J.D. ; Minne,S.C. ; Quate,C.F.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA.  pp.48-58,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4099
3.

Conference Proceedings
Conference Proceedings
3. In-situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques
Khuri-Yakub,B.T. ; Pei,J. ; Degertekin,F.L. ; Saraswat,K.C.
Pub. info.: Nondestructive Evaluation for Process Control in Manufacturing.  pp.131-135,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2948
4.

Conference Proceedings
Conference Proceedings
4. Micromachined capacitive immersion ultrasonic transducers
Khuri-Yakub,B.T. ; Jin,X.C. ; Ladabaum,I. ; Degertekin,F.L.
Pub. info.: Medical Imaging 1998: Ultrasonic Transducer Engineering.  pp.237-241,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3341
5.

Conference Proceedings
Conference Proceedings
5. Erosion/corrosion monitoring with dry-contact ultrasonic Lamb-wave transducers
Pei,J. ; Degertekin,F.L. ; Honein,B.V. ; Khuri-Yakub,B.T.
Pub. info.: Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware.  pp.428-435,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2945
6.

Conference Proceedings
Conference Proceedings
6. Micromachined ultrasonic transducers for air-coupled nondestructive evaluation
Hansen,S.T. ; Degertekin,F.L. ; Khuri-Yakub,B.T.
Pub. info.: Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware III.  pp.310-318,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3586