1.

Conference Proceedings
Conference Proceedings
1. Enabling Thermal Processing of High- and Low-Dielectric-Constant Materials
Thakur, R. P. S. ; DeBoer, S. J. ; Singh, R.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.369-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
2.

Conference Proceedings
Conference Proceedings
2. Thin Nitride Films: Pushing the Limits Using Rapid Thermal Processing
DeBoer, S. J. ; Thakur, R. P. S.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.225-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429