1.

Conference Proceedings
Conference Proceedings
1. Modelling and Process Optimisation in a Radial Flow Multiwafer MOVPE Reactor
Bergunde, T. ; Dauelsberg, M. ; Kadinski, L. ; Makarov, Yu.N. ; Strauch, G. ; Juergensen, H.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.230-237,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Mass Production of GaAs Based Optoelectronic Device in an AIX 2600G3 Reactor in the 42x2 Inch Configuration
Schineller, B. ; Schmitt, T. ; Christiansen, K. ; Chiu, C-S. ; Dauelsberg, M. ; Heuken, M.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.87-94,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-02
3.

Conference Proceedings
Conference Proceedings
3. Modeling Analysis of SiC CVD in a Planetary Reactor
Vorob'ev, A.N. ; Semennikov, A.K. ; Zhmakin, A.I. ; Makarov, Yu.N. ; Dauelsberg, M. ; Wischmeyer, F. ; Heuken, M. ; Juergensen, H.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.103-106,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356