1.

Conference Proceedings

Conference Proceedings
Pic, N. ; Polignano, M.L. ; Caputo, D. ; Salva, G. ; Sardo, M. ; Danel, A.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.505-515,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3
2.

Conference Proceedings

Conference Proceedings
Tardif, F. ; Raccurt, O. ; Barbe, J.C. ; De Crecy, F. ; Besson, P. ; Danel, A.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.153-160,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
3.

Conference Proceedings

Conference Proceedings
Tardif, F. ; Joly, J.-P. ; Courteaux, A. ; Straube, U. ; Danel, A. ; Kamarinos, G.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.385-393,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
4.

Conference Proceedings

Conference Proceedings
Nguyen, M.C. ; Danel, A.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.432-443,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
5.

Conference Proceedings

Conference Proceedings
Pic, N. ; Polignano, M.L. ; Caputo, D. ; Salva, G. ; Sardo, M. ; Danel, A.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.505-515,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
6.

Conference Proceedings

Conference Proceedings
Millet, C. ; Daviot, J. ; Danel, A. ; Perrut, V. ; Tardif, F. ; Broussous, L. ; Renault, O.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.271-278,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
7.

Conference Proceedings

Conference Proceedings
Shanmugasundaram, K. ; Chang, K. ; Shallenberger, J. ; Danel, A. ; Tardif, F. ; Ruzyllo, J.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.348-355,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
8.

Conference Proceedings

Conference Proceedings
Perrut, V. ; Danel, A. ; Millet, C. ; Daviot, J. ; Rignon, M. ; Tardif, F.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.246-253,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
9.

Conference Proceedings

Conference Proceedings
Danel, A. ; Lardin, T. ; Kamarinos, G. ; Tardif, F.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.394-403,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
10.

Conference Proceedings

Conference Proceedings
Danel, A. ; Tardif, F. ; Kamarinos, G. ; Nguyen, M.C.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.444-455,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13