1.

Conference Proceedings
Conference Proceedings
1. Fiber optic polymer residue monitor
Pfeifer,K.B. ; Jarecki,R.L.,Jr. ; Dalton,T.J.
Pub. info.: Chemical microsensors and applications : 4-5 November 1998, Boston, Massachusetts.  pp.36-44,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3539
2.

Conference Proceedings
Conference Proceedings
2. 193 lithography and RELACS processing for BEOL lithography
DellaGuardia,R. ; Petrillo,K.E. ; Chen,J. ; Rabidoux,P. ; Dalton,T.J. ; Holmes,S.J. ; Hadel,L.M. ; Malone,K. ; Mahorowala,A.P. ; Greco,S. ; Ferguson,R.A.
Pub. info.: Optical Microlithography XIV.  4346  pp.1029-1040,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
3.

Conference Proceedings
Conference Proceedings
3. When is bilayer thin-film imaging suitable: comparison with single-layer resists
Halle,S. ; Thomas,A.C. ; Armacost,M. ; Dalton,T.J. ; Chen,X.L. ; Bukofsky,S.J. ; Genz,O. ; Lu,Z.G. ; Butt,S.A. ; Chen,Z. ; Ferguson,R.A. ; Coker,E. ; Leidy,R.K. ; Lin,Q. ; Mahorowala,A.P. ; Babich,K. ; Petrillo,K.E. ; Angelopoulos,M. ; Ignatowicz,M. ; Bui,B.
Pub. info.: Optical Microlithography XIV.  4346  pp.970-981,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346