1.

Conference Proceedings
Conference Proceedings
1. Evaluation Of Candidate Metals For Dual-Metal Gate Cmos With Hfo_2 Gate Dielectric
Samavedam, S.B. ; Schaeffer, J.K. ; Gilmer, D.C. ; Dhandapani, V. ; Tobin, P.J. ; Mogab, J. ; Nguyen, B-Y. ; Dakshina-Murthy, S. ; Rai, R.S. ; Jiang, Z-X. ; Martin, R. ; Raymond, M.V. ; Zavala, M. ; La, L.B. ; Smith, J.A. ; Gregory, R.B.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.85-90,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Plasma-Etched RuO2 Substrates
Vartanian, V. ; Goolsby, B. ; Samavedam, S. ; Mendicino, L ; Lee, J.J. ; Guenther, T. ; Dakshina-Murthy, S. ; Sparks, C.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.51-62,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
3.

Conference Proceedings
Conference Proceedings
3. Integration of UTR processes into MPU IC manufacturing flows
Cobb, J.L. ; Dakshina-Murthy, S. ; Parker, C. ; Luckowski, E. ; Martinez, A.M. ; Peters, R.D. ; Wu, W. ; Hector, S.D.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.277-286,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of integrated circuits with high yield using ultra-thin resist processes
Peters, R.D. ; Postnikov, S.V. ; Cobb, J.L. ; Dakshina-Murthy, S. ; Stephens, T. ; Parker, C. ; Luckowski, E. ; Martinez, A.M. Jr., ; Wu, W. ; Hector, S.D.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1390-1401,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
5.

Conference Proceedings
Conference Proceedings
5. Controlling line-edge rougness to within reasonable limits
Cobb, J.L. ; Rauf, S. ; Thean, A. ; Dakshina-Murthy, S. ; Stephens, T. ; Parker, C. ; Peters, R.D. ; Rao, V.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.376-383,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039