1.

Conference Proceedings
Conference Proceedings
1. PECVD of SiOx Films with Electron Beam Generated Plasmas
D. Leonhardt ; S.G. Walton
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.389-393,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
2.

Conference Proceedings
Conference Proceedings
2. Diagnostics and Processing Applications of Electron Beam-Generated Plasmas Produced in Nitrogen
S.G. Walton ; D. Leonhardt ; R.F. Fernsler
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.404-408,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
3.

Conference Proceedings
Conference Proceedings
3. Characterizations of Electron Beam-Generated Plasmas
S.G. Walton ; D. Leonhardt ; R.F. Fernsler ; R.A. Meger ; D.D. Blackwell ; C. Muratore
Pub. info.: 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California.  pp.447-451,  2003.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 46
4.

Conference Proceedings
Conference Proceedings
4. Materials Processing in Electron Beam-Generated Plasmas
C. Muratore ; S.G. Walton ; D. Leonhardt ; R.F. Fernsler ; R.A. Meger
Pub. info.: 47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas.  pp.412-417,  2004.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 47
5.

Conference Proceedings
Conference Proceedings
5. Deposition of Silicon Dioxide Films Using Electron Beam-Generated Plasmas
S.G. Walton ; D. Leonhardt
Pub. info.: 48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado.  pp.433-437,  2005.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 48
6.

Conference Proceedings
Conference Proceedings
6. Ion Flux Measurements in Electron Beam-Generated Plasmas
S.G. Walton ; D. Leonhardt ; R.F. Fernsler ; R.A. Meger
Pub. info.: 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida.  pp.378-383,  2002.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 45
7.

Conference Proceedings
Conference Proceedings
7. Plasma Processing System Based on Electron Beam Ionization
D. Leonhardt ; M.M. Balkey ; R.F. Fernsler ; R.A. Meger ; D.P. Murphy ; S.G. Walton ; D.D. Blackwell
Pub. info.: 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida.  pp.354-359,  2002.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 45