1.

Conference Proceedings
Conference Proceedings
1. The effect of EUV molecular gloss architecture on the bulk dispersion of a photo-acid generator
D. L. VanderHart ; A. De Silva ; N. Felix ; V. M. Prabhu ; C. K. Ober
Pub. info.: Advances in resist materials and processing technology XXV.  1  pp.69231M-1-69231M-15,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923
2.

Conference Proceedings
Conference Proceedings
2. FTIR measurements of compositional heterogeneities
S. Kang ; B. D. Vogt ; W. Wu ; V. M. Prabhu ; D. L. VanderHart ; A. Rao ; E. K. Lin ; K. Turnquest
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519