1.

Conference Proceedings
Conference Proceedings
1. Ultra Shallow Junctions Optimization With Non-Doping Species Co-Implantation
Nathalie Cagnat ; Cyrille Laviron ; Daniel Mathiot ; Blandine Duriez ; Julien Singer ; Romain Gwoziecki ; Frederic Salvetti ; Benjamin Dumont ; Arnaud Pouydebasque
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.15-20,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
2.

Conference Proceedings
Conference Proceedings
2. Interaction Between Low Temperatures Spacers and Source Drain Extensions and Pockets for Both NMOS and PMOS of the 65 nm Node Technology
Nathalie Cagnat ; Cyrille Laviron ; Daniel Mathiot ; Pierre Morin ; Frederic Salvetti ; Davy Villanueva ; Marc Juhel ; Marco Hopstaken ; Francois Wacquant
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.71-76,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
3.

Conference Proceedings
Conference Proceedings
3. Shallow Junction Engineering by Phosphorus and Carbon Co-Implantation: Optimization of Carbon Dose and Energy
Nathalie Cagnat ; Cyrille Laviron ; Daniel Mathiot ; Chris Rando ; Marc Juhel
Pub. info.: Semiconductor defect engineering--materials, synthetic structures and devices II : symposium held April 9-13, 2007, San Francisco, California, U.S.A..  pp.217-222,  2007.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 994
4.

Conference Proceedings
Conference Proceedings
4. Atomistic Simulation and Subsequent Optimization of Boron USJ Using Pre-Amorphization and High Ramp Rates Annealing
Julien Singer ; François Wacquant ; Davy Villanueva ; Frédéric Salvetti ; Cyrille Laviron ; Olga Cueto ; Pierrette Rivallin ; Martín Jaraíz ; Alain Poncet
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.229-236,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070