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25 results

Conference Proceedings

1. Design and modeling of a silicon resonant pressure sensor

Cui,Z. ; Chen,D. ; Xia,S.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.187-193, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

2. Novel estimated algorithm for information fusion on MMW/IR dual-mode combined seeker

Cui,Z. ; Zeng,T. ; Long,T.

Pub. info.:	Data mining and applications : 23-24 October 2001, Wuhan, China. pp.60-64, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4556

Conference Proceedings

3. Investigation of OPC mask distortion effect

Cui,Z. ; Du,J.

Pub. info.:	Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK. pp.347-353, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4404

Conference Proceedings

4. Design and simulation of a vacuum micropump

Cui,Z. ; Takoudis,C.G.

Pub. info.:	Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA. pp.263-273, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4560

Conference Proceedings

5. Thermally excited SiN beam resonant pressure sensor

Chen,D. ; Cui,D. ; Yu,Z. ; Wang,L. ; Cui,Z. ; Xia,S.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.548-554, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

6. Electrothermal modeling of silicon PCR chips

Cui,Z. ; Zhao,Z. ; Xiao,S.

Pub. info.:	MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK. pp.275-280, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4407

Conference Proceedings

7. Fine OPC approach with gray-tone coding mask

Du,J. ; Su,J. ; Huang,Q. ; Zhang,Y. ; Guo,Y. ; Du,C. ; Cui,Z.

Pub. info.:	Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan. pp.348-351, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3740

Conference Proceedings

8. New method for optical proximity correction with gray-level serifs

Du,J. ; Huang,Q. ; Guo,Y. ; Cui,Z.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.932-938, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

9. Modified proximity function for OPC in laser direct writing

Du,J. ; Gao,F. ; Zhang,Y. ; Guo,Y. ; Du,C. ; Cui,Z.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1047-1052, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

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Conference Proceedings

10. TEMP: a software package for simulation of resist heating in electron-beam lithography

Cui,Z.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.420-430, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

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