Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.379-384, 1993. Pittsburgh, PA. Materials Research Society
Cox, J.N. ; Hutchinson, J.M. ; Lee, K.K.D. ; Sheridan, B. ; Wong, R. ; Yang, I.-C.J.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.636-643, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.117-126, 1994. Pennington, NJ. Electrochemical Society
Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.. pp.219-224, 1986. Pittsburgh, Pa.. Materials Research Society
Zhang, S. ; Franke, J.E. ; Niemezyk, T.M. ; Haaland, D.M. ; Cox, J.N. ; Banerjee, I. ; Gee, J. ; Dang, T. ; Puich, M.
Pub. info.:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.438-445, 1995. Pennington, NJ. Electrochemical Society