1.

Conference Proceedings
Conference Proceedings
1. Segregation of Cu on Etched and Non-Etched Al(Cu) Surface
Li, Hua ; Maex, Karen ; Brijs, Bert ; Conard, Thierry ; Vandervorst, Wilfried ; Baklanov, Michael ; Boullart, Werner ; Froyen, Ludo
Pub. info.: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.77-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 516
2.

Conference Proceedings
Conference Proceedings
2. Screening the High-k Layer Quality by Means of Open Circuit Potential Analysis and Wet Chemical Etching
Claes, Martine ; Gendt, Stefan De ; Witters, Thomas ; Kaushik, Vidya ; Chen, Jerry ; Conard, Thierry ; Delabie, Annelies ; Elshocht, Sven Van ; Heyns, Marc
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.15-22,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745