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14 results

Conference Proceedings

1. Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process

Michalicek,M.A. ; Comtois,J.H. ; Schriner,H.K.

Pub. info.:	Spatial light modulators : 28-29 January 1998, San Jose, California. pp.71-80, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3292

Conference Proceedings

2. Design and testing of polysilicon surface-micromachined piston micromirror arrays

Cowan,W.D. ; Bright,V.M. ; Lee,M.K. ; Comtois,J.H. ; Michalicek,M.A.

Pub. info.:	Spatial light modulators : 28-29 January 1998, San Jose, California. pp.60-70, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3292

Conference Proceedings

3. Experimental demonstration of using microelectromechanical deformable mirrors to control optical aberrations

Roggemann,M.C. ; Bright,V.M. ; Welsh,B.M. ; Hick,S.R. ; Roberts,P.C. ; Cowan,W.D. ; Comtois,J.H.

Pub. info.:	Adaptive optics and Adaptive optics and applications : 30 July-1 August 1997, San Diego, California. pp.173-184, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3126

Conference Proceedings

4. Control of a phase-locked laser diode array using piston micromirrors

Christensen,C.J. ; Bright,V.M. ; Grantham,J.W. ; Comtois,J.H.

Pub. info.:	Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas. pp.26-34, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2881

Conference Proceedings

5. Micromirror arrays for coherent beam steering and phase control

Gustafson,S.C. ; Little,G.R. ; Bright,V.M. ; Comtois,J.H. ; Watson,E.A.

Pub. info.:	Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas. pp.65-74, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2881

Conference Proceedings

6. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)

Craig Barron,C. ; Davies,B.R. ; Sniegowski,J.J. ; Rodgers,M.S. ; Comtois,J.H. ; Michalicek,M.A.

Pub. info.:	Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.10-16, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3223

Conference Proceedings

7. Force measurements of polysilicon thermal microactuators

Reid,J.R. ; Bright,V.M. ; Comtois,J.H.

Pub. info.:	Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.296-306, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2882

Conference Proceedings

8. Arrays of thermal microactuators coupled to micro-optical components

Reid,J.R. ; Bright,V.M. ; Comtois,J.H.

Pub. info.:	Actuator technology and applications : 7-8 August 1996, Denver, Colorado. pp.74-82, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2865

Conference Proceedings

9. Design techniques for surface-micromachining MEMS processes

Comtois,J.H. ; Bright,V.M.

Pub. info.:	Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.211-222, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2639

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Conference Proceedings

10. Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process

Michalicek,M.A. ; Comtois,J.H. ; Schriner,H.K.

Pub. info.:	Miniaturized Systems with Micro-Optics and Micromechanics III. pp.48-55, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3276

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Author: Comtois,J.H.