1.

Conference Proceedings
Conference Proceedings
1. Investigation of the deposition and integration of hard coatings for moving MEMS applications
Adams, P. M. ; Robertson, R. E. ; Cole, R. C. ; Hinkley, D. ; Radhakrishnan, G.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.123-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
2.

Conference Proceedings
Conference Proceedings
2. Pulsed-laser deposited TiC coatings for MEMS
Radhakrishnan, G. ; Adams, P.M. ; Robertson, R.E. ; Cole, R. C.
Pub. info.: High-Power Laser Ablation IV.  Part One  pp.289-300,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4760