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Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.72-80, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.504-515, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering