Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.95-106, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Spectroscopic Studies of Superconductors Part B : Tunneling,Photoelectron,and Other Spectra : 29 January - 1 February 1996, San Jose, California. PartB pp.338-346, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.515-526, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.615-626, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering