1.

Conference Proceedings
Conference Proceedings
1. Effect of chamber seasoning on the chrome dry etch process
Clevenger, J.O. ; Buie, M.J. ; Sandlin, N.L.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.92-100,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
2.

Conference Proceedings
Conference Proceedings
2. Optimization of a 65-nm alternating phase-shift quartz etch process
Anderson, S.A. ; Anderson, S.A., III ; Buie, M.J. ; Chandrachood, M. ; Clevenger, J.O. ; Lee, Y. ; Sandlin, N.L. ; Ding, J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.66-75,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
3.

Conference Proceedings
Conference Proceedings
3. Plasma and flow modeling of photomask etch chambers
Hammond, E. ; Clevenger, J.O. ; Buie, M.J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.713-723,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
4.

Conference Proceedings
Conference Proceedings
4. Optimization of chrome dry etch in Tetra II using asymmetrically loaded patterns
Brooks, C.B. ; Anderson, R.B., III ; Clevenger, J.O. ; Collard, C. ; Halim, M. ; Sahin, T. ; Mak, A.W.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.749-757,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
5.

Conference Proceedings
Conference Proceedings
5. Examination of various endpoint methods for chrome mask etch
Collard, C. ; Anderson, S.A. ; Anderson, R.B., III ; Clevenger, J.O. ; Halim, M. ; Brooks, C.B. ; Buie, M.J. ; Sahin, T.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.744-748,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256