1.

Technical Paper
Technical Paper
1. Construction of a 3D MEMS Microcoil Using Sequential Robotic Microassembly Operations.
Dechev, N. ; Cleghorn, W. L. ; Mills, J. K.
Pub. info.: A.S.M.E. paper.  2003.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : IMECE
Ser. no.: 2003
2.

Conference Proceedings
Conference Proceedings
2. Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator [6111-35]
Hassanpour, P. A. ; Cleghorn, W. L. ; Esmailzadeh, E. ; Mills, J. K.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V.  pp.61110W-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6111
3.

Conference Proceedings
Conference Proceedings
3. Zero-crossing edge detection for visual force measurement in assembly of MEMS devices [6109-19]
Anis, Y. H. ; Mills, J. K. ; Cleghorn, W. L.
Pub. info.: Micromachining and Microfabrication Process Technology XI.  pp.61090H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6109