1.

Technical Paper

Technical Paper
Clauss, W. ; Vereschagin, K. ; Ciezki, H.K.
Pub. info.: AIAA paper.  pp.1-14,  1998.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 1998
2.

Conference Proceedings

Conference Proceedings
Burnett, J. H. ; Kaplan, S. G. ; Shirley, E. L. ; Horowitz, D. ; Clauss, W. ; Grenville, A. ; Van Peski, C.
Pub. info.: Optical Microlithography XIX.  pp.615418-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154