1.

Conference Proceedings
Conference Proceedings
1. Mask data volume: historical perspective and future requirements [6281-21]
Spense, C. ; Goad, S. ; Buck, P. ; Gladhill, R. ; Cinque, R. ; Preuninger, J. ; Griesinger, U ; Blocker, M.
Pub. info.: EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany.  pp.62810H-,  2006.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6281
2.

Conference Proceedings
Conference Proceedings
2. Experimental characterization of constituent errors in electron-beam lithography [6283-17]
Cinque, R. ; Buck, P. ; Yei, S. K. ; Komagata, T. ; Nakagawa, Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62831M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
3.

Conference Proceedings
Conference Proceedings
3. Mask data volume: explosion or damp squib- [5992-38]
Spence, C. ; Good, S. ; Buck, P. ; Gladhill, R. ; Cinque, R.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599211-599211,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992