1.

Conference Proceedings
Conference Proceedings
1. STUDY OF SiF4N2-H2 PLASMAS FOR THE DEPOSITION OF FLUORINATED SILICON NITRIDE FILMS
Cicala, G. ; Bruno, G. ; Capezzuto, P. ; Losurdo, M.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.27-32,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. EFFECT OF PLASMA MODULATION IN THE GLOW DISCHARGE DEPOSITION OF AMORPHOUS SILICON FILMS
Bruno, G. ; Capezzuto, P. ; Cicala, G. ; Manodoro, P.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.289-294,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
3.

Conference Proceedings
Conference Proceedings
3. MASS SPECTROMETRIC THERMAL EVOLUTION OF NOVEL INDIUM METALORGANIC PRECURSORS FOR MOCVD
Bruno, G. ; Capezzuto, P. ; Cicala, G. ; Losurdo, M. ; Rossetto, G. ; Porchia, M. ; Zanella, P.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.69-74,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
4.

Conference Proceedings
Conference Proceedings
4. Enhancement of the Amorphous to Microcrystalline Phase Transition in Silicon Films Deposited by SiF4-H2-He Plasmas
Cicala, G. ; Losurdo, M. ; Capezzuto, P. ; Bruno, G. ; Ligonzo, T. ; Schiavulli, L. ; Minarini, C. ; Rossi, M. C.
Pub. info.: Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.493-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 536
5.

Conference Proceedings
Conference Proceedings
5. Deposition of Photoluminescent Nanocrystalline Silicon Films by SiF4-SiH4-H2 Plasmas
Cicala, G. ; Bruno, G. ; Capezzuto, P. ; Schiavulli, L. ; Capozzi, V. ; Perna, G.
Pub. info.: Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.809-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 452
6.

Conference Proceedings
Conference Proceedings
6. Selective Grafting of Amine Groups on Polyethylene by Means of Modulated RF NH3 Plasmas
Creatore, M. ; Cicala, G. ; Favia, P. ; Lamendola, R. ; d'Agostino, R.
Pub. info.: Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.115-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 544