Yun, E. J. ; Chun, H. G. ; Jung, K. ; Kwong, D. L. ; Lee, S.
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.255-260, 1989. Pittsburgh, Pa.. Materials Research Society