1.
Conference Proceedings
Breiland, W.G. ; Brennan, T.M. ; Chui, H.C. ; Hammons, B.E. ; Killeen, K.P.
Pub. info.:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing . pp.261-269, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-2
2.
Conference Proceedings
Hou, H.Q. ; Breiland, W.G. ; Hammons, B.E. ; Chui, H.C.
Pub. info.:
Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors . pp.27-35, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-2