1.

Conference Proceedings

Conference Proceedings
White,T.R. ; Kolar,D. ; Jahanbani,M. ; Frisa,L.E. ; Nagabushnam,R. ; Chuang,H. ; Tsui,P. ; Cope,J. ; Pulvirent,L. ; Bolton,S.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.112-119,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings

Conference Proceedings
Bhat,N. ; Chuang,H. ; Tsui,P. ; Woodruff,R. ; Grant,J. ; Kruth,R. ; Perera,A.H. ; Poon,S. ; Collins,S. ; Dyer,O. ; Misra,V. ; Yang,I. ; Venkatesan,S. ; Gilbert,P.V.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.167-174,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
3.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334