Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.195-200, 1999. Warrendale, Pa.. Materials Research Society
Follstaedt, D. M. ; Knapp, J. A. ; Myers, S. M. ; Dugger, M. T. ; Friedmann, T. A. ; Sullivan, J. P. ; Monteiro, O. R. ; Ager, J. W., III. ; Brown, I. G. ; Christenson, T.
Pub. info.:
Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.. pp.241-, 1999. Warrendale, Pa.. MRS - Materials Research Society