1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF POLYSILICON DEPOSITION AND THERMAL CYCLING ON THIN OXIDE QUALITY
Wu, N.R. ; Chiao, S. ; Bhushan, B. ; Batra, T. ; Fan, S.K. ; Pizzo, P. ; Yang, C.Y.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.513-518,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
2.

Conference Proceedings
Conference Proceedings
2. ELECTRON TRAPPING/DETRAPPING IN THIN SiO2 UNDER HIGH FIELDS
Wu, N., R. ; Chiao, S. ; Wang, C. ; Bhushan, B.
Pub. info.: Thin films : the relationship of structure to properties : symposium held April 15-17, 1985, San Francisco, California, U.S.A..  pp.99-106,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 47