1.

Conference Proceedings
Conference Proceedings
1. Model-based OPC methodology for 0.13 micron technology
Kamat,V.G. ; Green,K.G. ; Chheda,S.N. ; Muehie,S. ; Kolagunta,V. ; Wilkinson,B. ; Philbin,C.E.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.727-733,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings
Conference Proceedings
2. Gate-Length-and threshold-voltage-dependent nonlinearity in the hot carrier DC Lifetime extrapolation for sub-100-nm NMOS devices
Chheda,S.N. ; Bhat,N. ; Tsui,P. ; Gonzales,S. ; Cave,N. ; Fu,C.-C. ; Huang,F. ; Nangia,A. ; Choi,P.S.-J. ; Collins,S.
Pub. info.: Microelectronic Device Technology III.  pp.175-185,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3881