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18 results

Conference Proceedings

1. PLANARIZED COPPER INTERCONNECTS BY SELECTIVE ELECTROLESS PLATING

Kiang, M. H. ; Tao, J., ; Namgoong, W. ; Hu, C ; Lieberman, M. ; Cheung, N. W. ; Kang, H.-K. ; Wong. S. S.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.745-756, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. ION-BEAM MODIFICATION OF SILICIDED Ti/Si CONTACTS

Lester, S. D. ; Cheung, N. W.

Pub. info.:	Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.159-164, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	45

Conference Proceedings

3. PLASMA IMMERSION ION IMPLANTATION FOR IMPURITY GETTERING IN SILICON

Wong, H. ; Qian, X. Y. ; Cheung, N. W. ; Lieverman, M. A. ; Brown, I. G. ; Yu, K. M.

Pub. info.:	Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.. pp.91-96, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	147

Conference Proceedings

4. MEGAVOLT BORON AND ARSENIC IMPLANTATION INTO SILICON

Bryne, P. F. ; Cheung, N. W. ; Tam, S. ; Hu, C. ; Shih, Y. C. ; Washburn, J. ; Starthman, M.

Pub. info.:	Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.253-258, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	27

Conference Proceedings

5. INTERFACE AND BULK OXIDE DAMAGE INDUCED BY BORON INPLANTATION

Wong, E. ; Cheung, N. W.

Pub. info.:	Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.53-58, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	45

Conference Proceedings

6. ION BEAM MODIFICATION OF THE Y-Ba-Cu-O SYSTEM WITH THE MEVVA HIGH CURRENT METAL ION SOURCE

Brown, I. G. ; Rubin, M. D. ; Yu, K. M. ; Mutikainen, R. ; Cheung, N. W.

Pub. info.:	Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.. pp.391-396, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	147

Conference Proceedings

7. PLANARIZED COPPER INTERCONNECTS BY SELECTIVE ELECTROLESS PLATING

Kiang, M.H. ; Tao, J. ; Namgoong, W. ; Hu, C. ; Lieberman, M. ; Cheung, N. W. ; Kang, H.-K. ; Wong, S. S.

Pub. info.:	Materials reliability in microelectronics II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.187-198, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	265

Conference Proceedings

8. SHALLOW P+-N JUNCTION FABRICATION BY PLASMA IMMERSION ION IMPLANTATION

Pio, C. A. ; Qian, X. Y. ; Jones, E. ; Lieberman, M. A. ; Cheung, N. W.

Pub. info.:	Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.. pp.115-120, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	223

Conference Proceedings

9. FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)

Liu, J. B. ; Iyer, S. S. K. ; Min, J. ; Chu, P. ; Gronsky, R. ; Hu, C. ; Cheung, N. W.

Pub. info.:	Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.117-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	354

10.

Conference Proceedings

10. Formation of Buried Porous Silicon Structure by Hydrogen Plasma Immersion Ion Implantation

Fan, Z. ; Chu, Paul K. ; Lu, X. ; Iyer, S. S. K. ; Cheung, N. W.

Pub. info.:	Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.427-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	452

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Author: Cheung, N. W.