1.

Technical Paper

Technical Paper
Craig, G. ; Erdos, R. ; Cheung, B.
Pub. info.: 2003 World Aviation Congress and Exposition : SAE technical paper.  2003.  Warrendale, Penn.  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2003
2.

Conference Proceedings

Conference Proceedings
Feng, Y. ; Zhang, X. ; Cheung, B. ; Liu, Z. ; Isao, M. ; Hayashi, M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1173-1182,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375