1.

Conference Proceedings
Conference Proceedings
1. AFM/TEM Investigation of Low Temperature Polycrystalline Silicon Grown by ECR-CVD
Hsiao, H. L. ; Wang, K. C. ; Cheng, L. W. ; Yang, A. B. ; Yew, T. R. ; Hwang, H. L.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.195-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
2.

Conference Proceedings
Conference Proceedings
2. Silicide Contacts for Sub-0.25 ｦﾌm Devices
Chen, L. J. ; Cheng, S. L. ; Chang, S. M. ; Peng, Y. C. ; Huang, H. Y. ; Cheng, L. W.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.123-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564