1.

Conference Proceedings
Conference Proceedings
1. Low-Temperature Deposited Highly-Conductive n-Type SiC Thin Films
Cheng, Kuan-Lun ; Cheng, Huang-Chung ; Lee, Wen-Horng ; Lee, Chiapyng ; Yew, Tri-Rung
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.463-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472
2.

Conference Proceedings
Conference Proceedings
2. Diagnostic Techniques for Polycrystalline Thin Film Growth
Cheng, Kuan-Lun ; Cheng, Huang-Chung ; Yew, Tri-Rung
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.157-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
3.

Conference Proceedings
Conference Proceedings
3. POLYCRYSTALLINE β-SiC FILM GROWTH ON Si BY ECR-CVD AT 178-500°C
Cheng, Kuan-Lun ; Liu, Chih-Chien ; Fu, Chung-Min ; Cheng, Huang-Chung ; Lee, Chiapyng ; Yew, Tri-Rung
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.271-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403
4.

Conference Proceedings
Conference Proceedings
4. Effect of RTA on TiN Films as the Barrier Layer for Pt/BST/Pt Capacitors Prepared by RF Magnetron Co-Sputter Technique at Low Substrate Temperature
Juang, Miin-Horng ; Hwang, Chuan-Chou ; Cheng, Huang-Chung
Pub. info.: Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 672
5.

Conference Proceedings
Conference Proceedings
5. Novel N2O Plasma Passivation on Polycrystalline Silicon Thin-Film Transistors
Wang, Fang-Shing ; Huang, Chun-Yao ; Cheng, Huang-Chung
Pub. info.: Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.177-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 424
6.

Conference Proceedings
Conference Proceedings
6. Microcrystalline β-SiC Growth on Si by ECR-CVD at 500°C
Cheng, Kuan-Lun ; Liu, Chih-Chien ; Cheng, Huang-Chung ; Lee, Chiapyng ; Yew, Tri-Rung
Pub. info.: Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.799-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 358