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Conference Proceedings

1. Performance analysis and development of high-speed p-i-n infrared sensors prepared on crystalline silicon substrates

Chen,C.-Y. ; Ho,J.-J. ; Fang,Y.-K. ; Chen,S.-F.

Pub. info.:	Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan. pp.305-310, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4416

Conference Proceedings

2. Metal etch process defects

Lu,T.-Y. ; Hwang,Y.-K. ; Lai,C.-H. ; Chen,S.-F. ; Chen,C.-H.

Pub. info.:	Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland. pp.173-179, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3742

Conference Proceedings

3. Generation mechanism and reduction methods of post-passivation-etch silklike polymers

Young,C.-D. ; Chen,S.-F. ; Chen,C.-H.

Pub. info.:	Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland. pp.180-185, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3742

Conference Proceedings

4. SOG etch-back process induced surface roughness

Chu,P.-T. ; Chen,S.-F. ; Wu,J.-S. ; Hung,C.-C. ; Lin,T.-H. ; Chao,Y.-C.

Pub. info.:	Microelectronic Device and Multilevel Interconnection Technology II. pp.285-292, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2875