1.

Conference Proceedings
Conference Proceedings
1. Structure and property relationships of fractionated novolac resins
Chen,K.-J.R. ; Kwong,R.W. ; Jordhamo,G. ; Allen,R.D. ; Gallagher-Wetmore,P.M.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.596-607,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
2.

Conference Proceedings
Conference Proceedings
2. ArF resist for contact hole application
Chen,K.-J.R. ; Lawaon,M.C. ; Hughes,T. ; Brunsvld,W.R. ; Varanasi,P.R. ; Keller,R. ; Jordhamo,G.M.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.791-797,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
3.

Conference Proceedings
Conference Proceedings
3. Investigation on the mechanism of the 193-nm resist linewidth reduction during the SEM measurement
Wu,C.-H.J. ; Huang,W.-S. ; Chen,K.-J.R. ; Archie,C.N. ; Lagus,M.E.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.190-199,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345