Kimoto, T. ; Yamamoto, T. ; Chen, Z. Y. ; Yano, H. ; Matsunami, H.
Pub. info.:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.189-192, 2000. Zuerich, Switzerland. Trans Tech Publications
Xu, D. Y. ; Liu, Y. P. ; Chen, Z. Y. ; He, Z. W. ; Liu, X. Q. ; Wang, Y. Y.
Pub. info.:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.3681-3684, 2005. Uetikon-Zuerich. Trans Tech Publications
Metrology, Inspection, and Process Control for Microlithography XIX. pp.127-139, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Conference Proceedings
